Gas-phase silicon micromachining with xenon difluoride
- Author(s):
Chang,F.I. ( Univ.of California/Los Angeles ) Yeh,R. Lin,G. Chu,P.B. Hoffman,E.J. Kruglick,E.J.J. Pister,K.S.J. Hecht,M.H. - Publication title:
- Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 2641
- Pub. Year:
- 1995
- Page(from):
- 117
- Page(to):
- 128
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819420077 [0819420077]
- Language:
- English
- Call no.:
- P63600/2641
- Type:
- Conference Proceedings
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