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Hierarchical proximity correction using CAPROX

Author(s):
Hofmann,U. ( Sigma-C GmbH )
Kalus,C.K.
Rosenbusch,A.
Endo,H.
Kimura,Y.
Endo,A.
1 more
Publication title:
15th Annual BACUS Symposium on Photomask Technology and Management
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2621
Pub. Year:
1995
Page(from):
558
Page(to):
567
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819419859 [0819419850]
Language:
English
Call no.:
P63600/2621
Type:
Conference Proceedings

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