Stress and Volume Changes in Amorphous Mo/Si Multilayers on Annealing

Stress and Volume Changes in Amorphous Mo/Si Multilayers on Annealing

Author(s):

Publication title:

Surface layers : structure-property relations : proceedings of a symposium on the occasion of the 150th Anniversary of Delft University of Technology, May 14 - 15, 1992

Title of ser.:

Materials science forum

Ser. no.:

154

Pub. Year:

1994

Page(from):

55

Page(to):

66

Pub. info.:

Aedermannsdorf, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878496792 [0878496793]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00017432
Series ID:	PA00000012
Conf. info. (Name):	Symposium on the Occasion of the 150th Anniversary of Delft University of Technology
Conf. info. (Number):	1992
Conf. info. (Venue):	Delft, The Netherlands
Conf. info. (Date):	1992.05.14-1992.05.15

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