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Real Time Ellipsometry Characterization and Process Monitoring for Amorphous Carbon Deposition

Author(s):
Collins,R.W.  
Publication title:
Properties and characterization of amorphous carbon films
Title of ser.:
Materials science forum
Ser. no.:
52-53
Pub. Year:
1990
Page(from):
341
Page(to):
364
Pub. info.:
Zurich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878496044 [0878496041]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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