Substrate Sputter Erosion Effects During a-C:H Film Formation in a Glow Discharge

Substrate Sputter Erosion Effects During a-C:H Film Formation in a Glow Discharge

Author(s):

Publication title:

Properties and characterization of amorphous carbon films

Title of ser.:

Materials science forum

Ser. no.:

52-53

Pub. Year:

1990

Page(from):

291

Page(to):

300

Pub. info.:

Zurich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878496044 [0878496041]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00017428
Series ID:	PA00000012

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