Application of generalized ellipsometry to complex optical systems
- Author(s):
- Schubert,M. ( Univ.of Leipzig(FRG) )
- Rheinlander,B. ( Univ.of Leipzig(FRG) )
- Woollam,J.A. ( Univ.of Nebraska(USA) )
- Johs,B.D. ( J.A.Wooltam Co.(USA) )
- Herzinger,C.M. ( J.A.Wooltam Co.(USA) )
- Publication title:
- Polarimetry and ellipsometry : 20-23 May, 1996, Kazimierz Dolny, Poland
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3094
- Pub. Year:
- 1997
- Page(from):
- 255
- Page(to):
- 265
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819425096 [0819425095]
- Language:
- English
- Call no.:
- P63600/3094
- Type:
- Conference Proceedings
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