Stress measurement of deposited SiO2 films on a silicon wafer using dimensional-stability holographic interferometry test

Stress measurement of deposited SiO2 films on a silicon wafer using dimensional-stability holographic interferometry test

Author(s):

Dovgalenko,G.E. ( Univ.of Arkansas )

Haque,M.S. ( Univ.of Arkansas )

Kniazkov,A.V. ( Univ.of Arkansas )

Onischenko,Y.I. ( Univ.of Arkansas )

Salamo,G.J. ( Univ.of Arkansas )

Naseem,H.A. ( Univ.of Arkansas )

1 more

Publication title:

Optical manufacturing and testing II : 27-29 July 1997, San Diego, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3134

Pub. Year:

1997

Page(from):

475

Page(to):

485

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819425560 [0819425567]

Language:

English

Call no.:

P63600/3134

Type:

Conference Proceedings

Details

TDL ID:	ZA00017406
Series ID:	PA00000029
Conf. info. (Name):	Optics & Photonics : Optical Manufacturing and Testing
Conf. info. (Number):	1997 : 2nd
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	1997.07.27-1997.07.29

Similar Items:

1 Conference Proceedings In-situ thin film stress measurement using high-stability portable holographic interferometer Dovgalenko,G.E., Hague,S., Kniazkov,A., Onischenko,Y., Salamo,G.J., Naseem,H.A. SPIE-The International Society for Optical Engineering	7 Conference Proceedings Stress in Microwave Plasma Chemical Vapor Deposited (MPCVD) Diamond Films Naseem, H.A., Haque, M.S., Beera, R.A., Brown, W.D., Malshe, A.P. Electrochemical Society
2 Conference Proceedings Fast residual stress determination of welded joints using reversible holographic interferometric(RHI)film Dovgalenko,G.E., Kniazkov,A., Onischenko,Yu., Salamo,G.J. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Optimization algorithm in tensor vector theory of dynamic periodic structures and applications to optical sensors G.E. Dovgalenko, Y.I. Onischenko, I.I. Loutchkina, V. Bakhtin Society of Photo-optical Instrumentation Engineers
3 Conference Proceedings Advanced holographic nondestructive testing system for residual stress analysis Kniazkov,A., Onischenko,Yu.I., Dovgalenko,G.E., Salamo,G.J., Latychevskaia,T.Yu. SPIE - The International Society for Optical Engineering	9 Conference Proceedings Measurement of Residual Stress in ZnO Thin Films Deposited on Silicon Wafers by the Indentation Fracture Test Zhang, Tong-Yi, Huang, Bin Materials Research Society
4 Conference Proceedings Single-beam adaptive holographic interferometry (AHI) and small-size devices for industrial inspection G.E. Dovgalenko, Y. Onischenko, I.I. Loutchkina, G.J. Salamo Society of Photo-optical Instrumentation Engineers	10 Conference Proceedings High-resolution real-time adaptive optic microsensor for residual stress and vibration measurement in situ Dovgalenko,G.E., Loutchkina,I.I. SPIE-The International Society for Optical Engineering
5 Conference Proceedings Portable holographic interferometer for residual stress measurement and nondestructive testing(NDT)of pipelines Onishchenko,Yu., Kniazkov,A., Shulz,J., Salamo,G.J. SPIE - The International Society for Optical Engineering	11 Conference Proceedings Stress and Bonding Characterization of PECYD Silicon Dioxide Films Nassem, H.A., Haque, M.S., Brown, W.D. Electrochemical Society
6 Conference Proceedings Portable holographic interferometric device for aircraft inspecting G.E. Dovgalenko, Yu.I. Onischenko, I.I. Loutchkina, G.J. Salamo Society of Photo-optical Instrumentation Engineers	12 Conference Proceedings Bacteriorhodopsin as an optical limiter Dovgalenko,G.E., Klotz,M., Salamo,G.J., Wood,G.L. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12