Electrothermal modeling of a microbridge gas sensor

Electrothermal modeling of a microbridge gas sensor

Author(s):

Manginell,R.P. ( Sandia National Labs. )

Smith,J.H. ( Sandia National Labs. )

Ricco,A.J. ( Sandia National Labs. )

Hughes,R.C. ( Sandia National Labs. )

Moreno,D.J. ( Sandia National Labs. )

Huber,R.J. ( Univ.of Utah )

1 more

Publication title:

Micromachined Devices and Components III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3224

Pub. Year:

1997

Page(from):

360

Page(to):

371

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819426567 [0819426563]

Language:

English

Call no.:

P63600/3224

Type:

Conference Proceedings

Details

TDL ID:	ZA00017397
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : Micromachined Devices and Components
Conf. info. (Number):	1997 : 3rd
Conf. info. (Venue):	Austin, TX, USA
Conf. info. (Date):	1997.09.29

Similar Items:

1 Conference Proceedings Overview of micromachined platforms for thermal sensing and gas detection Manginell,R.P., Smith,J.H., Ricco,A.J. SPIE-The International Society for Optical Engineering	7 Conference Proceedings Microfabricated silicon gas chromatographic microchannels: fabrication and performance Matzke,C.M., Kottenstette,R.J., Casalnuovo,S.A., Frye-Mason,G.C., Hudson,M.L., Sasaki,D.Y., Manginell,R.P., Wong,C.C. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Characterization of the embedded micromechanical device approach to the monolithic integration of MEMS with CMOS Smith,J.H., Montague,S., Sniegowski,J.J., Murray,J.R., Manginell,R.P., McWhorter,P.J., Huber,R.J. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Chemical Sensors Based on Surface-Confined Dendrimers Tokuhisa, H., Crooks, R.M., Ricco, A.J., Osbourn, G.C. Electrochemical Society
3 Conference Proceedings A MEMS Based Hybrid Preconcentrator/Chemiresistor Chemical Sensor Hughes, R.C., Patel, S.V., Manginell, R.P. Electrochemical Society	9 Conference Proceedings Chemical Class Specificity Using Self-Assembled Monolayers On SAW Devices: Effects of Adsorption Time and Substrate Grain Size Thomas, R.C., Ricco, A.J., DiRubio, C.R., Yang, H.C., Crooks, R.M. Electrochemical Society
4 Conference Proceedings Impedance Studies of Chemiresistive Platforms Used in Gas Sensors Vanysek, P., Ricco, A., Hughes, R.C., Yelton, W.G., Josowicz, M. Electrochemical Society	10 Conference Proceedings Effects of propagation in air on photon statistics (Invited Paper) Milonni, P.W., Carter, J.H., Peterson, C.G., Hughes, R.J. SPIE-The International Society for Optical Engineering
5 Conference Proceedings Micromachined Silicon CO Gas Sensors Lyle, R.P., Hughes, H.G., Walters, D. Electrochemical Society	11 Conference Proceedings Incorporation of bioactive materials into integrated systems Bunker, B.C., Huber, D.L., Manginell, R.P., Kim, B.-I., Boal, A.K., Bachand, G.D., Rivera, S.B., Bauer, J.M., Matzke, … SPIE - The International Society of Optical Engineering
6 Conference Proceedings Rapid detection of bacteria with miniaturized pyrolysis-gas chromatographic analysis Mowry, C., Morgan, C.H, Baca, Q., Manginell, R.P., Kottenstette, R.J., Lewis, P., Frye-Mason, G.C. SPIE-The International Society for Optical Engineering	12 Conference Proceedings Mass Sensitive, Lorentz-Force Actuated, MEMS Preconcentrator and Chemical Sensor R.P. Manginell, D. Adkins, M. Moorman, R. Hadizadeh, D. Copic Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12