Excimer laser micromachining system for the production of bioparticle electromanipulation devices
- Author(s):
Rizvi,N.H. ( Exitech Ltd. (UK) ) Harvey,E.C. ( Exitech Ltd. (UK) ) Rumsby,P.T. ( Exitech Ltd. (UK) ) Burt,J.P.H. ( Univ.of Wales (UK) ) Talary,M.S. ( Univ.of Wales (UK) ) Tame,J.A. ( Univ.of Wales (UK) ) Pethig,R. ( Univ.of Wales (UK) ) - Publication title:
- Micromachined Devices and Components III
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3224
- Pub. Year:
- 1997
- Page(from):
- 266
- Page(to):
- 272
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819426567 [0819426563]
- Language:
- English
- Call no.:
- P63600/3224
- Type:
- Conference Proceedings
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