Laser micromachined and laminated microchannel components for chemical sensors and heat transfer applications

Author(s):

• Martin,P.M. ( Pacific Northwest National Lab. )
• Bennett,W.D. ( Pacific Northwest National Lab. )
• Hammerstrom,D.J. ( Pacific Northwest National Lab. )
• Johnston,J.W. ( Pacific Northwest National Lab. )
• Matson,D.W. ( Pacific Northwest National Lab. )

Publication title:

Micromachined Devices and Components III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3224

Pub. Year:

1997

Page(from):

258

Page(to):

265

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819426567 [0819426563]

Language:

English

Call no.:

P63600/3224

Type:

Conference Proceedings