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Novel highly scalable and very high torque micromotor for MEMS and MOEMS applications using the mechanical rectification of oscillatory motion

Author(s):
Publication title:
Miniaturized Systems with Micro-Optics and Micromechanics III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3276
Pub. Year:
1998
Page(from):
271
Page(to):
279
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427151 [0819427152]
Language:
English
Call no.:
P63600/3276
Type:
Conference Proceedings

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