Nonsilicon micromachining for MOEMS elements

Nonsilicon micromachining for MOEMS elements

Author(s):

Chen,Y.-X. ( Shanghai Jiao Tong Univ.(China) )
Zhao,X.-L. ( Shanghai Jiao Tong Univ.(China) )
Wang,Z.-G. ( Shanghai Jiao Tong Univ.(China) )

Publication title:

Miniaturized Systems with Micro-Optics and Micromechanics III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3276

Pub. Year:

1998

Page(from):

263

Page(to):

270

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819427151 [0819427152]

Language:

English

Call no.:

P63600/3276

Type:

Conference Proceedings

Details

TDL ID:	ZA00017392
Series ID:	PA00000029
Conf. info. (Name):	Photonics West : Miniaturized Systems with Micro-Optics and Micromechanics
Conf. info. (Number):	1998 : 3rd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	1998.01.26-1998.01.27

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