Design and fabrication of optical MEMS using a four-level planarized surface-micromachined polycrystalline silicon process

Design and fabrication of optical MEMS using a four-level planarized surface-micromachined polycrystalline silicon process

Author(s):

Michalicek,M.A. ( Air Force Research Lab. )
Comtois,J.H. ( Air Force Research Lab. )
Schriner,H.K. ( Sandia National Labs. )

Publication title:

Miniaturized Systems with Micro-Optics and Micromechanics III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3276

Pub. Year:

1998

Page(from):

48

Page(to):

55

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819427151 [0819427152]

Language:

English

Call no.:

P63600/3276

Type:

Conference Proceedings

Details

TDL ID:	ZA00017392
Series ID:	PA00000029
Conf. info. (Name):	Photonics West : Miniaturized Systems with Micro-Optics and Micromechanics
Conf. info. (Number):	1998 : 3rd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	1998.01.26-1998.01.27

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