Optical measurement of LIGA milliengine performance
- Author(s):
- Dickey,F.M. ( Sandia National Labs. )
- Holswade,S.C. ( Sandia National Labs. )
- Christenson,T.R. ( Sandia National Labs. )
- Garcia,E.J. ( Sandia National Labs. )
- Polosky,M.A. ( Sandia National Labs. )
- Publication title:
- Miniaturized Systems with Micro-Optics and Micromechanics III
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3276
- Pub. Year:
- 1998
- Page(from):
- 28
- Page(to):
- 36
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427151 [0819427152]
- Language:
- English
- Call no.:
- P63600/3276
- Type:
- Conference Proceedings
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