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Laser micromachining of silicon: a new technique for fabricating terahertz imaging arrays

Author(s):
Walker,C.K. ( Steward Observatory/Univ.of Arizona )
Hungerford,A.L. ( Steward Observatory/Univ.of Arizona )
Narayanan,G. ( Steward Observatory/Univ.of Arizona )
Groppi,C. ( Steward Observatory/Univ.of Arizona )
Bloomstein,T.M. ( MIT Lincoln Lab. )
Palmacci,S.T. ( MIT Lincoln Lab. )
Stern,M.B. ( MIT Lincoln Lab. )
Curtin,J.E. ( MIT Lincoln Lab. )
3 more
Publication title:
Advanced technology MMW, radio, and terahertz telescopes : 26-28 March 1998, Kona, Hawaii
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3357
Pub. Year:
1998
Page(from):
45
Page(to):
52
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819428042 [0819428043]
Language:
English
Call no.:
P63600/3357
Type:
Conference Proceedings

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