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Micromachined inductive displacement sensor

Author(s):
  • Velten,Th. ( Technical Univ.of Berlin (Germany) )
  • Krause,P. ( Technical Univ.of Berlin (Germany) )
  • Stefan,O. ( Technical Univ.of Berlin (Germany) )
  • Obermeier,E. ( Technical Univ.of Berlin (Germany) )
Publication title:
Micromachined Devices and Components IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3514
Pub. Year:
1998
Page(from):
331
Page(to):
338
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429735 [0819429732]
Language:
English
Call no.:
P63600/3514
Type:
Conference Proceedings

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