Solder-bonded micromachined capacitive pressure sensors
- Author(s):
- Rogge,B. ( Swiss Federal Institute of Technology )
- Moser,D. ( Micronas Semiconductor SA (Switzerland) )
- Oppermann,H. ( FhG/IZM (Germany) )
- Paul,O. ( Swiss Federal Institute of Technology )
- Baltes,H. ( Swiss Federal Institute of Technology )
- Publication title:
- Micromachined Devices and Components IV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3514
- Pub. Year:
- 1998
- Page(from):
- 307
- Page(to):
- 315
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819429735 [0819429732]
- Language:
- English
- Call no.:
- P63600/3514
- Type:
- Conference Proceedings
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