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Polysilicon for everything? (Invited Paper)

Author(s):
Ward,M.C.L. ( Defence Evaluation Research Agency Malvern (UK) )
McNie,M.E. ( Defence Evaluation Research Agency Malvern (UK) )
Bunyan,R.J.T. ( Defence Evaluation Research Agency Malvern (UK) )
King,D.O. ( Defence Evaluation Research Agency Malvern (UK) )
Carline,R.T. ( Defence Evaluation Research Agency Malvern (UK) )
Wilson,R. ( Defence Evaluation Research Agency Malvern (UK) )
Gillham,J.P. ( Defence Evaluation Research Agency Malvern (UK) )
2 more
Publication title:
Micromachined Devices and Components IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3514
Pub. Year:
1998
Page(from):
298
Page(to):
306
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429735 [0819429732]
Language:
English
Call no.:
P63600/3514
Type:
Conference Proceedings

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