Integrated mixedtechnology design environment to support micro-electro-mechanical systems development
- Author(s):
- Karam,J.M. ( MEMSCAP SA (France) )
- Courtois,B. ( TIMA Lab. (France) )
- Cao,A.D. ( Mentor Graphics Corp. )
- Hofmann,K. ( Darmstadt Univ.Qf Technology (Germany) )
- Publication title:
- Micromachined Devices and Components IV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3514
- Pub. Year:
- 1998
- Page(from):
- 278
- Page(to):
- 286
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819429735 [0819429732]
- Language:
- English
- Call no.:
- P63600/3514
- Type:
- Conference Proceedings
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