Micromachined high Q inductors for high-frequency applications
- Author(s):
- Park,J.Y. ( Georgia Institute of Technology )
- Allen,M.G. ( Georgia Institute of Technology )
- Publication title:
- Micromachined Devices and Components IV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3514
- Pub. Year:
- 1998
- Page(from):
- 218
- Page(to):
- 228
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819429735 [0819429732]
- Language:
- English
- Call no.:
- P63600/3514
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Micromachined Inductors with Electroplated Magnetically Anisotropic Alloy Cores
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
IMAPS |
8
Conference Proceedings
(618bi) Micromachined High Surface Area Structures for Energy Storage Applications
American Institute of Chemical Engineers |
3
Conference Proceedings
Electroplated and screen-printed magnetic materials applicable to micromachined magnetic devices (Invited Paper)
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
Polysilicon micromachining 3D mirror integrated frequency tuner for WDM applications
SPIE-The International Society for Optical Engineering |
4
Conference Proceedings
Micromachined Planar Inductors with Electroplated Nickel-Iron Permalloy Cores (Spiral Type, Solenoid Type, and Toroidal-Meander Type)
Electrochemical Society |
10
Conference Proceedings
High frequency piezoelectric micromachined ultrasonic transducers for imaging applications (Invited Paper) [6223-16]
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |