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Acoustic-wave chemical microsensors in GaAs

Author(s):
Casalnuovo,S.A. ( Sandia National Labs. )
Heller,E.J. ( Sandia National Labs. )
Hietala,S.L. ( Sandia National Labs. )
Baca,A.G. ( Sandia National Labs. )
ottenstette,R.J. ( Sandia National Labs. )
Reno,J.L. ( Sandia National Labs. )
Frye-Mason,G.C. ( Sandia National Labs. )
2 more
Publication title:
Micromachined Devices and Components IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3514
Pub. Year:
1998
Page(from):
103
Page(to):
110
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429735 [0819429732]
Language:
English
Call no.:
P63600/3514
Type:
Conference Proceedings

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