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Submicron Technology

Author(s):
Publication title:
Frontiers in nanoscale science of micron/submicron devices
Title of ser.:
NATO ASI series. Series E, Applied sciences
Ser. no.:
328
Pub. Year:
1996
Page(from):
1
Page(to):
18
Pages:
18
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISSN:
0168132X
ISBN:
9780792343011 [0792343018]
Language:
English
Call no.:
N11482/328
Type:
Conference Proceedings

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