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Chemical beam etching and epitaxy with atomic scale control and instant switching between etching and epitaxy

Author(s):
Tsang T. W.  
Publication title:
Low dimensional structures prepared by epitaxial growth or regrowth on patterned substrates
Title of ser.:
NATO ASI series. Series E, Applied sciences
Ser. no.:
298
Pub. Year:
1995
Page(from):
357
Page(to):
375
Pages:
19
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISSN:
0168132X
ISBN:
9780792336792 [0792336798]
Language:
English
Call no.:
N11482/298
Type:
Conference Proceedings

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