Importance of Surface Chemistry/Catalysis in the Processing of Semiconductors

Importance of Surface Chemistry/Catalysis in the Processing of Semiconductors

Author(s):

Publication title:

Fundamental aspects of heterogeneous catalysis studied by particle beams

Title of ser.:

NATO ASI series. Series B, Physics

Ser. no.:

265

Pub. Year:

1991

Page(from):

43

Page(to):

55

Pages:

13

Pub. info.:

New York: Plenum Press

ISBN:

9780306440021 [0306440024]

Language:

English

Call no.:

N11479/265

Type:

Conference Proceedings

Details

TDL ID:	ZA00017227
Series ID:	PA00000015
Conf. info. (Name):	NATO Advanced Study Institute on Fundamental Aspects of Heterogeneous Catalysis Studied by Particle Beams
Conf. info. (Number):	1990
Conf. info. (Venue):	Alicante, Spain
Conf. info. (Date):	1990.09.03-1990.09.14

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