Blank Cover Image

Fabrication of an uncooled infrared sensor using pyroelectric thin film

Author(s):
Park,Y.-K. ( Univ.of Seoul )
Ju,B.-K.
Park,H.-W.
Yoon,Y.-S.
Yom,S.-S.
Oh,Y.-J.
Park,J.-H.
Suh,S.-H.
Oh,M.-H.
Kim,C.-J.
5 more
Publication title:
Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3892
Pub. Year:
1999
Page(from):
356
Page(to):
363
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434937 [0819434930]
Language:
English
Call no.:
P63600/3892
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Performance evaluation of a lead-titanate (PbTiO3) pyroelectric thin-film infrared sensor with temperature isolation improvement structure by …

Ho,J.-J., Fang,Y.K., Chen,C.Y., Chen,G.S., Ju,M.S.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Improved process control of photomask fabrication in e-beam lithography

Cha,B.-C., Park,J.-H., Choi,Y.-H., Kim,J.-M., Han,W.-S., Yoon,H.-S., Sohn,J.-M.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Growth and characterization of GaN thin films on Si(111) substrates using SiC intermediate layer

Lim, K. Y., Lee, K. J., Park, C. I., Kim, K. C., Choi, S. C., Lee, W-H., Suh, E-K., Yang, G. M., Nahm, K. S.

MRS-Materials Research Society
8 Conference Proceedings A NEW DEVICE MODEL OF AMORPHOUS SILICON THIN-FILM TRANSISTOR FOR CIRCUIT SIMULATION

Choi, H.S., Park, J.S., Oh, C.H., Joo. I.S., Kim, Y.S., Han, M.K., Chio, Y.I., Yun, J.G., Park, W.K., Kim, W.Y.

Materials Research Society
3 Conference Proceedings Development of a pyroelectric thin film infrared sensor by micro-opto-electro-mechanical system(MOEMS)technology

Ho,J.-J., Fang,Y.K., Hsieh,M.C., Chen,C.Y., Ting,S.F., Lin,S.M., Wu,K.H.

SPIE - The International Society for Optical Engineering
9 Conference Proceedings Electrostatically vacuum-sealed tunneling magnetic field sensors

Park,H.W., Ju,B.K., Lee,J., Park,J.H., Oh,M.H.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Surface micromachining and characterization of pyroelectric infrared ray focal plane array utilizing Pb(Zr0.3Ti0.7)O3 thin films

Ryu, S. O., Cho, S. M., You, I. K., Yoon, S. M., Kim, K. D., Yu, B. G.

SPIE - The International Society of Optical Engineering
10 Conference Proceedings Semiconductor film bolometer technology for uncooled IR sensors

M.H. Unewisse, K.C. Liddiard, B.I. Craig, S.J. Passmore, R.J. Watson

Society of Photo-optical Instrumentation Engineers
5 Conference Proceedings ACCELERATED DEGRADATION MECHANISMS IN AMORPHOUS SILICON THIN FILM TRANSISTORS .

Chung, I.J., Oh, C.H., Kim, W.Y., Hwang, J.Y., Kim, Y.S., Park, J.S., Lee, S.K., Han, M.K.

Materials Research Society
11 Conference Proceedings Fabrication of holographic input coupler for optical storage device using photopolymer

Shin, C. W., Kim, N., Kim, J. H., Vu, V. T., Suh, D. W., Paek, M. C., Park, Y. W.

SPIE - The International Society of Optical Engineering
6 Conference Proceedings Uncooled infrared imaging using thin film ferroelectrics

Hanson,C.M., Beratan,H.R., Belcher,J.F.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Monolayer Formation of Colloidal Nanoparticles on Various Substrates by Single and Multiple Dip-Coating Process

Yoon, T. S., Oh, J., Park, S. H., Kim, V., Kwon, C., Kim, K. B.

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12