Blank Cover Image

Dry release process of anhydrous HF gas-phase etching for the fabrication of a vibrating microgyroscope

Author(s):
Jang,W.I. ( Electronics and Telecommunications Research Institute )
Choi,C.A.
Hong,Y.S.
Jun,C.H.
Kim,Y.T.
Lee,J.H.
1 more
Publication title:
Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3892
Pub. Year:
1999
Page(from):
332
Page(to):
339
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434937 [0819434930]
Language:
English
Call no.:
P63600/3892
Type:
Conference Proceedings

Similar Items:

Jang,W.I., Choi,C.A., Lee,C.S., Hong,Y.S., Lee,J.H., Baek,J.T., Kim,B.W.

SPIE-The International Society for Optical Engineering

Jang,W.-I., Choi,C.-A., Lee,C.-S., Hong,Y.-S., Lee,J.-H.

SPIE - The International Society for Optical Engineering

Jang,W.-I., Choi,C.-A., Lee,M.-L., Jun,C.-H., Kim,Y.T.

SPIE-The International Society for Optical Engineering

Lee,C.S., Jang,W.I., Choi,C.A., Hong,Y.S., Lee,J.H., No,K., Wee,D.M.

SPIE-The International Society for Optical Engineering

Jang,W.I., Lee,Y.I., Choi,C.A., Jun,C.H., Kim,Y.T.

SPIE - The International Society for Optical Engineering

Lee,J.H., Lee,M.L., Jang,W.I., Choi,C.A., Kim,K.

SPIE - The International Society for Optical Engineering

Hong,Y.-S., Lee,J.-H., Lee,C.-S., Jang,W.-1., Choi,C.-A., Kim,S.-H., Kwak,Y.-K.

SPIE - The International Society for Optical Engineering

Hong,Y., Lee,J.H., Kim,S.

SPIE - The International Society for Optical Engineering

Jun,C.-H., Choi,C.-A., Jang,W.I., Kim,Y.T.

SPIE-The International Society for Optical Engineering

Choi,C.-A., Jang,W.-I., Lee,M.-L., Kim,Y.T.

SPIE-The International Society for Optical Engineering

Lee,J.H., Lee,M.L., Jang,W.I., Choi,C.A., Kim,Y.T.

SPIE-The International Society for Optical Engineering

Lee,J.H., Lee,M.L., Jang,W.I., Choi,C.A., Joo,J.W.

SPIE - The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12