Lens FPD and LH effect on CD control of lithography process
- Author(s):
- Huang,D.F. ( Taiwan Semiconductor Manufacturing Co. )
- Hung,C.-C.
- Publication title:
- Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3892
- Pub. Year:
- 1999
- Page(from):
- 282
- Page(to):
- 288
- Pub. info.:
- Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434937 [0819434930]
- Language:
- English
- Call no.:
- P63600/3892
- Type:
- Conference Proceedings
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