Blank Cover Image

Excimer coated optics for medical setup at 193 nm

Author(s):
Publication title:
Advances in Optical Interference Coatings : 25-27 May 1999, Berlin, Germany
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3738
Pub. Year:
1999
Page(from):
366
Page(to):
374
Pub. info.:
Bellingham, WA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819432124 [0819432121]
Language:
English
Call no.:
P63600/3738
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Dielectric Interference Coatings for Medical Excimer Set Up at 193 nm

Novopashin,V.V., Levchuk,E.A., Shestakov,A.V.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings High quality low loss coatings for diode-pumped solid-state lasers

Levchuk, Elena A., Novopashin, Vladimir V., Shestakov, Alexander V.

SPIE
2 Conference Proceedings High-quality interference coatings for LBO and BBO crystals produced by the ion-beam technique

Levtchouk,E.A., Novopashin,V.V., Shestakov,A.V.

SPIE - The International Society for Optical Engineering
8 Conference Proceedings 193-NM EXCIMER LASER-ASSISTED ETCHING OF POLYSILICON

Armacost, M.D., Babu, S.V., Nguyen, S.V., Rembetski, J.F.

Materials Research Society
3 Conference Proceedings Novel aspects in optics with interference coatings for medical excimer setup

Novopashin, Vladimir V., Levchuk, Elena A., Shestakov, Alexsandr A.

SPIE
9 Conference Proceedings ArF excimer laser for 193-nm lithography

Stamm,U., Patzel,R., Kleinschmidt,J., Vogler,K., Zschocke,W., Bragin,I., Basting,D.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings High-Quality Low-Loss Coatings for Diode-Pumped Solid State Lasers

Levchuk,E.A., Novopashin,V.V., Shestakov,A.V.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Solid sampling with 193-nm excimer laser ablation

R. Delmdahl

SPIE - The International Society of Optical Engineering
5 Conference Proceedings Thin interference films for nonlineal crystals

Levchuk,E.A., Novopashin,V.V., Shestakov,A.V.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Longevity of 193-nm/ArF excimer pellicle

Kozeki,T., Shigematsu,S., Kondo,M., Nakagawa,H.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Laser-strength mirrors for high-power NIR-region solid state lasers

Novopashin,V.V., Levchuk,E.A., Shestakov,A.V.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Subpicometer ArF excimer laser for 193-nm lithography

Akita,J., Komori,H., Kouda,N., Yoshioka,S., Itakura,Y., Mizoguchi,H.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12