Microstructure and radiation interactions of optical interference coatings for 193-nm applications

Microstructure and radiation interactions of optical interference coatings for 193-nm applications

Author(s):

Heber,J. ( Fraunhofer Institut far Angewandte Physik und Feinmechanik )

Publication title:

Advances in Optical Interference Coatings : 25-27 May 1999, Berlin, Germany

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3738

Pub. Year:

1999

Page(from):

159

Page(to):

165

Pub. info.:

Bellingham, WA: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819432124 [0819432121]

Language:

English

Call no.:

P63600/3738

Type:

Conference Proceedings

Details

TDL ID:	ZA00017152
Series ID:	PA00000029
Conf. info. (Name):	SPIE Optical Systems Design : Advances in Optical Interference Coatings
Conf. info. (Number):	1999
Conf. info. (Venue):	Berlin, Germany
Conf. info. (Date):	1999.05.25-1999.05.27

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