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3D microstructuring with F2 lasers

Author(s):
Publication title:
Micro-opto-electro-mechanical systems : 22-23 May 2000, Glasgow, Scotland, United Kingdom
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4075
Pub. Year:
2000
Page(from):
159
Page(to):
166
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819437129 [0819437123]
Language:
English
Call no.:
P63600/4075
Type:
Conference Proceedings

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