Micro-opto-electro-mechanical systems:recent developments and LETI's activities

Micro-opto-electro-mechanical systems:recent developments and LETI's activities

Author(s):

Ollier,E. ( CEA-LETI )
Mottie,P.L.

Publication title:

Micro-opto-electro-mechanical systems : 22-23 May 2000, Glasgow, Scotland, United Kingdom

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4075

Pub. Year:

2000

Page(from):

12

Page(to):

21

Pub. info.:

Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819437129 [0819437123]

Language:

English

Call no.:

P63600/4075

Type:

Conference Proceedings

Details

TDL ID:	ZA00017127
Series ID:	PA00000029
Conf. info. (Name):	Micro-opto-electro-mechanical systems
Conf. info. (Number):	2000
Conf. info. (Venue):	Glasgow, Scotland, UK
Conf. info. (Date):	2000.05.22-2000.05.23

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