Laser-induced particle removal from silicon wafers
- Author(s):
Leiderer,P. ( Univ.of Konstantz ) Boneberg,J. Dobler,V. Mosbacher,M. Munzer,H.-J. Chaoui,N. Siegel,J. Solis,J. Afnso,C.N. Fourrier,T. Schrems,G. Bauerle,D. - Publication title:
- High-power laser ablation III, 24-28 April 2000, Santa Fe, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4065
- Pub. Year:
- 2000
- Page(from):
- 249
- Page(to):
- 259
- Pub. info.:
- Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819437006 [081943700X]
- Language:
- English
- Call no.:
- P63600/4065
- Type:
- Conference Proceedings
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