Blank Cover Image

High Deposition Rate Amorphous Silicon Solar Cells and Thin Film Transistors using the Pulsed Plasma PECVD Technique

Author(s):
Madan,Arun  
Publication title:
Proceedings of the Tenth International Workshop on the Physics of Semiconductor Devices (December 14-18, 1999)
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3975
Pub. Year:
2000
Vol.:
Part2
Page(from):
1191
Page(to):
1197
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819436016 [0819436011]
Language:
English
Call no.:
P63600/3975
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings High Deposition Rate Amorphous Silicon Solar Cells and Thin Film Transistors Using the Pulsed Plasma PECVD Technique

Morrison, Scott, Xi, Jianping, Madan, Arun

MRS - Materials Research Society
7 Conference Proceedings Nano-Crystalline Si Based Alloy (nc-SiXY) with Band Gap of 1.5 eV as the Solar Cell Absorber Layer Fabricated by VHF-PECVD Technique

Feng Zhu, Jian Hu, Ilvydas Matulionis, Josh Gallon, Arun Madan

Materials Research Society
2 Conference Proceedings Amorphous And Microcrystalline Silicon Solar Cells Grown By Pulsed PECVD Technique

Das, Ujjwal K., Morrison, Scott, Madan, Arun

Materials Research Society
8 Conference Proceedings (729a) Simulation and Control of Plasma-Enhanced Chemical Vapor Deposition (PECVD) Process for the Manufacturing of Silicon Thin Film Solar Cells

Sangil Kwon, Marquis Crose, Dong Ni, Gerassimos Orkoulas, Panagiotis D. Christofides

American Institute of Chemical Engineers
3 Conference Proceedings Reel-to-Reel Cassette Cluster Tool System for Thin Film Transistor and Four Terminal Solar Cell Fabrication

Madan, Arun

Materials Research Society
9 Conference Proceedings (729a) Simulation and Control of Plasma-Enhanced Chemical Vapor Deposition (PECVD) Process for the Manufacturing of Silicon Thin Film Solar Cells

Sangil Kwon, Marquis Crose, Dong Ni, Gerassimos Orkoulas, Panagiotis D. Christofides

American Institute of Chemical Engineers
4 Conference Proceedings Reel-to-Reel Cassette Cluster Tool System for Thin Film Transistor and Four Terminal Solar Cell Fabrication

Madan, Arun

Materials Research Society
10 Conference Proceedings Properties of Nano-crystalline Silicon-Carbide Films Prepared Using Modulated RF- PECVD

Feng Zhu, Jian Hu, Ilvydas Matulionis, Augusto Kunrath, Arun Madan

Materials Research Society
5 Conference Proceedings OXYGENATED AND FLOURINATED AMORPHOUS SILICON NITRIDE FILMS AND THEIR USE IN THIN FILM TRANSISTORS

Bhat, P. K., Ogura, H., Madan, A.,

Materials Research Society
11 Conference Proceedings Thin Microcrystalline Silicon by a Microwave Remote Plasma Deposition Scheme for Heterojunction Solar Cells and Thin-Film Transistors

Jagannathan, B., Wallace, R. L., Anderson, W. A.

MRS - Materials Research Society
6 Conference Proceedings INFLUENCE OF TRANSPARENT CONDUCTING OXIDE ON AMORPHOUS SILICON SOLAR CELL PERFORMANCE

Walker, Chris, Hollingsworth, Russell, del Cueto, Joe, Madan, Arun

Materials Research Society
12 Conference Proceedings Deposition of microcrystalline silicon thin films for solar cells by VHF-PECVD

Zhang, X., Zhao, Y., Zhu, F., Mai, Y., Wei, C., Gao, Y., Hou, G., Sun, J., Li, J., Geng, X., Xiong, S.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12