Blank Cover Image

Effect of Backside Cu Diffusion on the Electrical Characteristics of MOSFET

Author(s):
Publication title:
Proceedings of the Tenth International Workshop on the Physics of Semiconductor Devices (December 14-18, 1999)
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3975
Pub. Year:
2000
Vol.:
Part1
Page(from):
633
Page(to):
636
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819436016 [0819436011]
Language:
English
Call no.:
P63600/3975
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Backside Copper Contamination Issues In CMOS Process Integration - A Case Study

Prasad, K., Tee, K., Chan, L., See, A.K.

Materials Research Society
7 Conference Proceedings Direct Electrical Characteristics of GaN Nanowire Field Effect Transistor (FET) without Assistance of E-Beam Lithography (EBL)

Lee, S.K., Seong, H.K., Choi, K.C., Cho, N.K., Choi, H.J., Suh, E.K., Nahm, K.S.

Trans Tech Publications
2 Conference Proceedings Copper Contamination Issues in MOS Integrated Circuits

Prasad, K., Tee, K.C., Chan, L., See, A.K.

Electrochemical Society
8 Conference Proceedings Effect of SiGe Layer on Electrical Characteristics of SGI-PDSOI MOSFETs

Choc, T.H., Bac, G.J., Kim, S.S., Rhee, H.S., Lee, K.W., Lee, N.I., Kang, H.S., Fujihara, K., Kang, H.K., Moon, J.T.

Electrochemical Society
3 Conference Proceedings Electrical and Reliability Characteristics in Strained-Si MOSFETs

C. Yang, T. Pan, K. Chen, C. Liu

Electrochemical Society
9 Conference Proceedings Impact of Wafer Backside Cu Contamination to 0.18 um Node Devices

Gu, SQ., Duong, L., Elmer, I., Prasad, S.

Electrochemical Society
4 Conference Proceedings Effect of interferometric noise in fiber Bragg grating sensors using tunable laser sources

Jin,W., Ho,H.L., Chan,C.C., Chan,K.C.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Precipitation in an Al-Cu-Mg Alloy Containing Trace Addition of In

Mukhopadhyay,A.K., Prasad,K.S., Chakravorty,C.R.

Trans Tech Publications
5 Conference Proceedings OXYGEN DIFFUSION IN YBa2Cu3O7-ｦﾄ

Routbort,J.L., Rothman,S.J., Nowicki,L.J., Goretta,K.C.

Trans Tech Publications
11 Conference Proceedings Impact of Ge Diffusion and Wafer Cross Hatching on Strained Si MOSFET Electrical Parameters

Driscoll, L., Olsen, S., Chattopadhyay, S., O'Neill, A., Kwa, K., Dobrosz, P., Bull, S.

Materials Research Society
6 Conference Proceedings Diffusion Studies Of Cu In Si And Low-K Dielectric Materials

Prasad, K., Yuan, X.L., Tan, C.M., Zhang, D.H., Li, C. Y., Wang, S.R., Yuan, S.Y.J., Xie, J.L., Gui, D., Foo, P.D.

Materials Research Society
12 Conference Proceedings Synthesis of pure C40 TiSi2 for Si wafer fabrication

Chen,S.Y., Shen,Z.X., Xu,S.Y., See,A.K., Chan,L.H., Li,W.S.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12