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Synchrotron radiation X-ray microdiffraction study of Cu interconnects

Author(s):
Zhang, X.
Solak, H.
Cerrina, F.
Lai, B.
Cai, Z.
Ilinski, P.
Legnini, D.
Rodrigues, W.
3 more
Publication title:
Applications of synchrotron radiation techniques to materials science V : sympoisum held November 29-December 3, 1999, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
590
Pub. Year:
2000
Page(from):
259
Pub. info.:
Warrendale, Pa.: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558994980 [155899498X]
Language:
English
Call no.:
M23500/590
Type:
Conference Proceedings

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