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Athermal Annealing of Silicon

Author(s):
Grun, J.
Manka, C. K.
Hoffman, C. A.
Meyer, J. R.
Glembocki, O. J.
Qadri, S. B.
Skelton, E. F.
Donnelly, D.
Covington, B.
4 more
Publication title:
Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
510
Pub. Year:
1998
Page(from):
395
Pub. info.:
Warrendale, Pa: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994164 [1558994165]
Language:
English
Call no.:
M23500/510
Type:
Conference Proceedings

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