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Control of the Sb Redistribution in Strained SiGe Layers Using Point-Defect Injection

Author(s):
Kuznetsov, A. Yu.
Cardenas, J.
Grahn, J. V.
Svensson, B. G.
Larsen, A. N.
Hansen, J. Lundsgaard
1 more
Publication title:
Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
510
Pub. Year:
1998
Page(from):
119
Pub. info.:
Warrendale, Pa: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994164 [1558994165]
Language:
English
Call no.:
M23500/510
Type:
Conference Proceedings

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