Kinetics of Pt Silicide Formation Studied by Spectral Ellipsometry
- Author(s):
Schwarz, R. Dittrich, A. Zhou, S. M. Hundhausen, M. Ley, L. Chen, L. Y. Woerle, D. Manke, C. Schulz, M. - Publication title:
- Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 470
- Pub. Year:
- 1997
- Page(from):
- 259
- Pub. info.:
- Pittsburgh, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993747 [1558993746]
- Language:
- English
- Call no.:
- M23500/470
- Type:
- Conference Proceedings
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