Blank Cover Image

Characterization of Oxide Etching and Wafer Cleaning Using Vapor-Phase Anhydrous HF and Ozone

Author(s):
Publication title:
Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
470
Pub. Year:
1997
Page(from):
237
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993747 [1558993746]
Language:
English
Call no.:
M23500/470
Type:
Conference Proceedings

Similar Items:

Froeschle, Barbara, Glowacki, Frederique, Bauer, Anton J., Kasko, Igor, Oechsner, Richard, Schneider, Claus

MRS - Materials Research Society

Froeschle, B., Glowacki, F., Bauer, A., Kasko, I., Oechsner, R., Schneider, C.

Electrochemical Society

Glowacki, F., Froeschle, B., Deutschmann, L., Sagnes, I., Laviale, D., Bensahel, D., Halimaoui, A., Martin, F., Bauer, …

MRS - Materials Research Society

Aderhold, W. R., Shah, N., Bogen, S., Bauer, A., Burte, E. P.

MRS - Materials Research Society

Carter, R.J., Hauser, J.R., Nemanich, R.J.

Electrochemical Society

Muscat, A.J., Lawing, A.S., Xu, H., Sawin, H.H.

American Institute of Chemical Engineers

Muscat, Anthony J., Lawing, Scott A., Sawin, Herbert H., Butterbaugh, Jeff, Syverson, Dan, Hiatt, Fred

Electrochemical Society

de Larios, J.M., Borland, J.O.

Electrochemical Society

Butterbaugh, J.W., Hiatt, C.F., Gray, D.C.

Electrochemical Society

Jang,W.I., Choi,C.A., Lee,C.S., Hong,Y.S., Lee,J.H., Baek,J.T., Kim,B.W.

SPIE-The International Society for Optical Engineering

Han, Y.-P., Lawing, S., Sawin, H.

Electrochemical Society

Kwon, O., Sawin, H.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12