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Integrated Vapor Phase Cleaning and Pure NO Nitridation for Gate Stack Formation

Author(s):
Glowacki, F.
Froeschle, B.
Deutschmann, L.
Sagnes, I.
Laviale, D.
Bensahel, D.
Halimaoui, A.
Martin, F.
Bauer, A. J.
4 more
Publication title:
Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
470
Pub. Year:
1997
Page(from):
229
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993747 [1558993746]
Language:
English
Call no.:
M23500/470
Type:
Conference Proceedings

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