Integrated Rapid Thermal CVD Processing Solutions For 0.18-0.25 ヲフm Technologies
- Author(s):
Gilboa, H. Gilboa, Y. E. Atzmon, Z. Levy, S. Spilberg, H. Bransky, E. Doitel, Z. Thakur, R. P. S. Weimer, R. A. DeBoer, S. Pan, J. - Publication title:
- Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 470
- Pub. Year:
- 1997
- Page(from):
- 215
- Pub. info.:
- Pittsburgh, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993747 [1558993746]
- Language:
- English
- Call no.:
- M23500/470
- Type:
- Conference Proceedings
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