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Temperature Dependent Emissivity on Multilayers of Silicon

Author(s):
Abedrabbo, S.
Ravindra, N. M.
Chen, W.
Rajasekhar, V.
Golota, T.
Gokce, O. H.
Nguyenphu, A. T. Fiory B.
Nanda, A.
Speranza, T.
Maszara, W.
Williamson, G.
6 more
Publication title:
Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
470
Pub. Year:
1997
Page(from):
69
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993747 [1558993746]
Language:
English
Call no.:
M23500/470
Type:
Conference Proceedings

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