Temperature Measurement Issues in Rapid Thermal Processing

Temperature Measurement Issues in Rapid Thermal Processing

Author(s):

Publication title:

Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

470

Pub. Year:

1997

Page(from):

3

Pub. info.:

Pittsburgh, PA: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993747 [1558993746]

Language:

English

Call no.:

M23500/470

Type:

Conference Proceedings

Details

TDL ID:	ZA00017058
Series ID:	PA00000011
Conf. info. (Name):	Symposium on rapid thermal and integrated processing
Conf. info. (Number):	6th
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1997.04.01-1997.04.04

Similar Items:

1 Conference Proceedings Monte Carlo Thermal Model of an Integrating Light Pipe for Rapid Thermal Processing Thomas, J. C., DeWitt, D. P. MRS - Materials Research Society	7 Conference Proceedings TEMPERATURE MEASUREMENT BY INFRARED TRANSMISSION FOR RAPID THERMAL PROCESSING APPLICATIONS Sturm, J.C., Schwartz, P.V., Garone, P.M. Materials Research Society
2 Conference Proceedings Modeling Chamber Radiation Effects on Radiometric Temperature Measurement in Rapid Thermal Processing Rosa, F., Zhou, Y.H., Zhong, Z.M., DeWin, D.P., Thai, B.K. Electrochemical Society	8 Conference Proceedings *APPLICATIONS OF RAPID THERMAL PROCESSING Gibbons, J. F., Bodkin, D. M., Grenier, M. E., Hoyt, J. L., Opyd, W. G. North-Holland
3 Conference Proceedings IN-SITU EMMISSIVITY AND TEMPERATURE MEASUREMENT DURING RAPID THERMAL PROCESSING (RTP) Vandenabeele, P., Schreutelkamp, R. J., Maex, K., Vermeiren, C., Coppye, W. Materials Research Society	9 Conference Proceedings Silicidation and metallization issues using Rapid Thermal Processing Maex K. Kluwer Academic Publishers
4 Conference Proceedings Low-Temperature Measurements and Monitors for Rapid Thermal Processing Timans, P.J., Acharya, N., Amarilic, I. Electrochemical Society	10 Conference Proceedings HEATING RATE EFFECTS IN RAPID THERMAL ANNEALING OF ARSENIC IMPLANTED SILICON Souza, J. P. de, Fichtner, P. F. P., Sadana, D. K. MRS - Materials Research Society
5 Conference Proceedings Capping layers,cleaning method,and rapid thermal processing temperature on cobalt silicide formation Saigal,D., Lai,G., Yang,L., Su,J., Ngan,K., Narasimhan,M.K., Chen,F.E., Singhal,A., Lopes,D., Lian,S., Cao,W., Tsai,K., … SPIE - The International Society for Optical Engineering	11 Conference Proceedings Rapid Thermal Processing-Based Heteroepitaxy: Material and Device Challenges Hoyt, J. L., Kuo, P., Rim, K., Welser, J. J., Emerson, R. M., Gibbons, J. F. MRS - Materials Research Society
6 Conference Proceedings RAPID THERMAL PROCESSING OF HIGH TEMPERATURE SUPERCONDUCTING FIBER Halloran, J. W., Neal, M. J., Ginley, D. S., Venturini, E. L., Kwak, J. F., baughman, R. J., Mitchell, M. A., Morosin, … Materials Research Society	12 Conference Proceedings TRANSIENT THERMAL ANALYSIS FOR RAPID THERMAL PROCESSING OF GaAs Yang, F. K., Pien, S. J., Kwor, R Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12