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Application of Porous Silicon to Bulk Silicon Micromachining

Author(s):
Publication title:
Materials for smart systems II : sympsoium held December 2-5, 1996, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
459
Pub. Year:
1997
Page(from):
249
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993631 [1558993630]
Language:
English
Call no.:
M23500/459
Type:
Conference Proceedings

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