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A Technique for Measuring Slurry-Flow Dynamics During Chemical Mechanical Polishing

Author(s):
Publication title:
Environmental, safety, and health issues in IC production : symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
447
Pub. Year:
1997
Page(from):
95
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993518 [1558993517]
Language:
English
Call no.:
M23500/447
Type:
Conference Proceedings

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