Ti Salicide Technology Using Nitrogen Diffusion from TiN CAP by RTA in an Argon Ambient
- Author(s):
- Publication title:
- Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 427
- Pub. Year:
- 1996
- Page(from):
- 517
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993303 [1558993304]
- Language:
- English
- Call no.:
- M23500/427
- Type:
- Conference Proceedings
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