Blank Cover Image

Thermal Metalorganic Chemical Vapor Deposition of Ti-Si-N Films for Diffusion Barrier Applications

Author(s):
Custer, J. S.
Smith, Paul Martin
Jones, Ronald V.
Maverick, A. W.
Roberts, D. A.
Norman, J. A. T.
Hochberg, A. K.
2 more
Publication title:
Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
427
Pub. Year:
1996
Page(from):
343
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993303 [1558993304]
Language:
English
Call no.:
M23500/427
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Chemical Vapor Deposition of Refractory Ternary Nitrides for Advanced Diffusion Barriers

Custer, Jonathan S., Smith, Paul Martin, Fleming, James G., Roherty-Osmun, Elizabeth

American Chemical Society
7 Conference Proceedings Deposition of Potassium Niobate Thin Films by Metalorganic Chemical Vapor Deposition and Their Nonlinear Optical Properties

Nystrom, M. J., Wessels, B. W., Chen, J., Studebaker, D., Marks, T. J., Lin, W. P., Wong, G. K.

MRS - Materials Research Society
2 Conference Proceedings The Chemical Vapor Deposition of Al-Cu Films Utilizing Independent Aluminum and Copper Organometallic Sources in a Simultaneous Deposition

Healy, Matthew D., Norman, John A. T., Hochberg, Arthur K.

MRS - Materials Research Society
8 Conference Proceedings Microstructures of GaN Films Grown on a LiGaO2 New Substrate by Metalorganic Chemical Vapor Deposition

Li, Jing-Hong, Kryliouk, Olga M., Holloway, Paul H., Anderson, Timothy J., Jones, Kevin S.

MRS - Materials Research Society
3 Conference Proceedings Growth and Properties of W-Si-N Diffusion Barriers Deposited by Chemical Vapor Deposition

Fleming, J. G., Roherty-Osmun, E., Custer, J. S.

MRS - Materials Research Society
9 Conference Proceedings Photoreflectance Study of GaN Film Grown by Metalorganic Chemical Vapor Deposition

Yang, K., Zhang, R., Zheng, Y. D., Qin, L. H., Shen, B., Shi, H. T., Huang, Z. C., Chen, J. C.

MRS - Materials Research Society
4 Conference Proceedings Growth of High Quality InGaN Films by Metalorganic Chemical Vapor Deposition

Roberts, J. C., McIntosh, F. G., Boutros, K. S., Bedair, S. M., Moussa, M., Piner, E. L., He, Y., El-Masry, N. A.

MRS - Materials Research Society
10 Conference Proceedings ORGANOMETALLIC CHEMICAL VAPOR DEPOSITION OF COPPER FROM A NEW ORGANOMETALLIC PRECURSOR

Fine, Stephen M., Dyer, Paul N., Norman, John A.T., Muratore, Beth A., Iampietro, Robert L.

Materials Research Society
5 Conference Proceedings Quality and Growth Rate of Hot-wire Chemical Vapor Deposition Epitaxial Si Layers

Charles W Teplin, Ina T. Martin, Kim M. Jones, David Young, Manuel J. Romero, Robert C. Reedy, Howard M. Branz, Paul …

Materials Research Society
11 Conference Proceedings Characteristics of Cu-Pd Films Grown by Simultaneous Chemical Vapor Deposition from Metalorganic Precursors

Bhaskaran, V., Atanasova, P., Hampden-Smith, M. J., Kodas, T. T.

MRS - Materials Research Society
6 Conference Proceedings Nanoheteroepitaxy of GaN on columnar SiC substrates by metalorganic chemical vapor deposition

Y. Fu, U. Ozgur, Q. Fan, N. Biyikli, S. Chevtchenko, H. Morkoc, Y. Ke, R. Devaty, W. J. Choyke, C. K. Inoki, T. S. Kuan

SPIE - The International Society of Optical Engineering
12 Conference Proceedings METALORGANIC CHEMICAL VAPOR DEPOSITION OF InP BY PULSING PRECURSORS

Chen, W.K., Chen, J.C., Anthony, L., Liu, P.L.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12