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Nanoscale Modification of Amorphous Diamond-Like Carbon Film Surfaces

Author(s):
Mercer, T. W.
DiNardo, N. J.
Sullivan, J. P.
Friedmann, T. A.
Siegal, M. P.
Martinez-Miranda, L. J.
1 more
Publication title:
Diamond for electronic applications
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
416
Pub. Year:
1996
Page(from):
175
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993198 [1558993193]
Language:
English
Call no.:
M23500/416
Type:
Conference Proceedings

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