The Control of Intrinsic Stresses in CVD Diamond Films With Multistep Processing
- Author(s):
- Publication title:
- Diamond for electronic applications
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 416
- Pub. Year:
- 1996
- Page(from):
- 163
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993198 [1558993193]
- Language:
- English
- Call no.:
- M23500/416
- Type:
- Conference Proceedings
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