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AFM/TEM Investigation of Low Temperature Polycrystalline Silicon Grown by ECR-CVD

Author(s):
Hsiao, H. L.
Wang, K. C.
Cheng, L. W.
Yang, A. B.
Yew, T. R.
Hwang, H. L.
1 more
Publication title:
Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
406
Pub. Year:
1996
Page(from):
195
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993099 [1558993096]
Language:
English
Call no.:
M23500/406
Type:
Conference Proceedings

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